The Hitachi SU8230 SEM employs a cold field emission (CFE) electron source for improved imaging and analytical performance. The Hitachi CFE gun complements the inherent high resolution and brightness of conventional CFE with increased probe current and beam stability.This advanced source enables unmatched low-voltage imaging and comprehensive microanalysis while still maintaining very high resolution. Enhanced deceleration and selective energy filtering provide fine contrast differentiation at ultra-low accelerating voltages.
Specifications:
- Accelerating voltage range: 20V - 30 kV
- Resolution:
- 0.8 nm @ 15KV
- 1.1 nm @ 1KV
- Integrated 80mm2 Oxford EDS detector for elemental analysis and mapping.
